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Effect of nonlinearity on mode localization phenomena in dynamics of MEMS resonant sensor with two electrostatically coupled microbeams

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Publication:2047536
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DOI10.1134/S1063454121020072zbMath1471.74025MaRDI QIDQ2047536

N. I. Morozov, V. S. Igumnova, I. A. Popov, L. V. Shtukin, A. V. Lukin, D. A. Indejtsev

Publication date: 20 August 2021

Published in: Vestnik St. Petersburg University. Mathematics (Search for Journal in Brave)


zbMATH Keywords

weakly coupled systemresonant accelerometerresonance curvemodal localization


Mathematics Subject Classification ID

Rods (beams, columns, shafts, arches, rings, etc.) (74K10) Vibrations in dynamical problems in solid mechanics (74H45) Electromagnetic effects in solid mechanics (74F15)


Related Items (1)

Model of a micromechanical mode-localized accelerometer with an initially curved microbeam as a sensitive element







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