Enhanced Kalman-filtering iterative learning control with application to a wafer scanner

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Publication:2053823

DOI10.1016/j.ins.2020.05.125zbMath1478.93183OpenAlexW3040037754MaRDI QIDQ2053823

Yang Liu, Jiubin Tan, Xiao-Feng Yang, Li Li

Publication date: 30 November 2021

Published in: Information Sciences (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.ins.2020.05.125






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