A thermomechanical and photochemical description of the phase change process in roll-to-roll nanoimprinting lithography

DOI10.1016/J.IJENGSCI.2021.103564OpenAlexW3197622809MaRDI QIDQ2059837

Kumbakonam R. Rajagopal, J. P. Gomez-Constante, Prabhakar R. Pagilla

Publication date: 14 December 2021

Published in: International Journal of Engineering Science (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.ijengsci.2021.103564

zbMATH Keywords

viscoelastic materialmultiscale modelingmechanics of mixturesnanoimprinting lithographyphotochemical bondingroll-to-roll transport

Mathematics Subject Classification ID

Mechanics of deformable solids (74-XX) Fluid mechanics (76-XX)

Related Items (3)

A thermodynamic framework for the additive manufacturing of crystallizing polymers. I: A theory that accounts for phase change, shrinkage, warpage and residual stress ⋮ Localisation of stress-affected chemical reactions in solids described by coupled mechanics-diffusion-reaction models ⋮ A thermomechanical and photochemical description of the phase change process in roll-to-roll nanoimprinting lithography

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