Electrostatically actuated initially curved micro beams: analytical and finite element modelling

DOI10.1007/978-3-030-77310-6_21zbMath1492.74100OpenAlexW4206222373MaRDI QIDQ2073890

Yanyan Li

Publication date: 8 February 2022

Full work available at URL: https://doi.org/10.1007/978-3-030-77310-6_21

zbMATH Keywords

finite element methodsnap-through bucklingreduced-order modelmicroelectromechanical systemnumerical continuation methodbistable beam

Mathematics Subject Classification ID

Rods (beams, columns, shafts, arches, rings, etc.) (74K10) Finite element methods applied to problems in solid mechanics (74S05) Micromechanics of solids (74M25) Thermal effects in solid mechanics (74F05) Bifurcation and buckling (74G60) Electromagnetic effects in solid mechanics (74F15)

Uses Software

• ANSYS
• MATCONT

Cites Work

• Design and modeling of some sensing and actuating mechanisms for MEMS applications
• The effect of the small-aspect-ratio approximation on canonical electrostatic MEMS models
• MATCONT