Self-consistent model of low pressure inductively coupled RF discharge

DOI10.1007/978-3-030-87809-2_44OpenAlexW4295788390MaRDI QIDQ2091517

Ekaterina Samsonova, Viktor Zheltukhin, Aleksandr Shemakhin, Timur Terentev

Publication date: 1 November 2022

Full work available at URL: https://doi.org/10.1007/978-3-030-87809-2_44

Mathematics Subject Classification ID

Numerical methods for partial differential equations, boundary value problems (65Nxx)

Uses Software

• Bolsig

Cites Work

• Spectrum of an elliptic equation
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