Nonlinearity reduction in MEMS resonators based on design of H-shaped beams

DOI10.1007/s00707-022-03340-1zbMath1504.74034OpenAlexW4301394202MaRDI QIDQ2092977

Chunyan Zhou, Qiancheng Zhao, Xinxi Zhang, Qing Fu

Publication date: 4 November 2022

Published in: Acta Mechanica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s00707-022-03340-1

zbMATH Keywords

method of multiple scalesfinite element methodnonlinear stiffnesselectrically excited resonant systemRayleigh-Ritz energy method

Mathematics Subject Classification ID

Rods (beams, columns, shafts, arches, rings, etc.) (74K10) Analytic approximation of solutions (perturbation methods, asymptotic methods, series, etc.) of dynamical problems in solid mechanics (74H10) Vibrations in dynamical problems in solid mechanics (74H45) Finite element methods applied to problems in solid mechanics (74S05) Electromagnetic effects in solid mechanics (74F15)

Cites Work

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• A higher-order nonlinear beam element for planar structures by using a new finite element approach
• Analysis of electromechanical systems based on the absolute nodal coordinate formulation
• On the sensitivity of bifurcation-based electrostatic MEMS sensors: cantilever with tip plate
• Simultaneous determination of the mass and position of attached particles using a micro-beam resonant mass sensor with axial pre-tension
• The vectorization of ITPACK 2C

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