Disturbance rejection run-to-run controller for semiconductor manufacturing

DOI10.1007/978-3-030-25446-9_13zbMath1441.93189OpenAlexW2974585485MaRDI QIDQ2181823

Panos M. Pardalos, Marzieh Khakifirooz, Mahdi Fathi

Publication date: 20 May 2020

Full work available at URL: https://doi.org/10.1007/978-3-030-25446-9_13

zbMATH Keywords

wafer fabricationdiscrete-time run-to-run control systemdisturbance rejection controller

Mathematics Subject Classification ID

Application models in control theory (93C95) Perturbations in control/observation systems (93C73)

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