Reconstruction algorithm of 3D surface in scanning electron microscopy with backscattered electron detector

DOI10.1515/jiip-2020-0136zbMath1478.78027OpenAlexW3138770401MaRDI QIDQ2232095

Dmitry V. Lukyanenko, A. A. Borzunov, Eduard I. Rau, Anatoly G. Yagola

Publication date: 4 October 2021

Published in: Journal of Inverse and Ill-Posed Problems (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1515/jiip-2020-0136

zbMATH Keywords

reconstruction algorithmscanning electron microscopy3D topographybackscattered electrons detector

Mathematics Subject Classification ID

Numerical solutions to overdetermined systems, pseudoinverses (65F20) Ill-posedness and regularization problems in numerical linear algebra (65F22) Technical applications of optics and electromagnetic theory (78A55) Inverse problems (including inverse scattering) in optics and electromagnetic theory (78A46) Optimization problems in optics and electromagnetic theory (78M50) Electron optics (78A15)

Cites Work

• Unnamed Item
• Computational methods for applied inverse problems. Selected papers based on the presentations at the international workshop, Beijing, China, July 12--16, 2010.
• Fast and accurate surface normal integration on non-rectangular domains
• Regularized reconstruction of a surface from its measured gradient field
• Definitions and examples of inverse and ill-posed problems

This page was built for publication: Reconstruction algorithm of 3D surface in scanning electron microscopy with backscattered electron detector