Comparative analysis of algorithms for solving inverse problems related to monochromatic monitoring the deposition of multilayer optical coatings

DOI10.1134/S0965542521090116zbMath1478.78034OpenAlexW3206790217MaRDI QIDQ2245912

Yu. S. Lagutin, S. A. Sharapova, Dmitry V. Lukyanenko, A. A. Lagutina, A. V. Tikhonravov, Anatoly G. Yagola, Igor V. Kochikov

Publication date: 15 November 2021

Published in: Computational Mathematics and Mathematical Physics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1134/s0965542521090116

zbMATH Keywords

algorithmsinverse problemserror correlationoptical coatingserror self-compensationmonochromatic monitoring

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Basic methods for problems in optics and electromagnetic theory (78M99) Inverse problems (including inverse scattering) in optics and electromagnetic theory (78A46) Experimental work for problems pertaining to optics and electromagnetic theory (78-05)

Cites Work

• Stable method for optical monitoring the deposition of multilayer optical coatings
• Correlation of errors in inverse problems of optical coatings monitoring
• Mathematical investigation of the error self-compensation mechanism in optical coating technology

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