Optimal reduction of a spatial monitoring grid: proposals and applications in process control

DOI10.1016/J.CSDA.2012.08.007zbMath1365.62011OpenAlexW2087337421MaRDI QIDQ2361216

Diego Zappa, Luigi Radaelli, Riccardo Borgoni, Valeria Tritto

Publication date: 30 June 2017

Published in: Computational Statistics and Data Analysis (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.csda.2012.08.007

zbMATH Keywords

krigingsimulated annealingspatial samplingstatistics for microelectronics

Mathematics Subject Classification ID

Applications of statistics in engineering and industry; control charts (62P30)

Uses Software

• spcosa
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Cites Work

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• Model-based clustering for integrated circuit yield enhancement
• Sparse sampling: spatial design for monitoring stream networks
• Collecting spatial data. Optimum design of experiments for random fields.
• Bayesian Geostatistical Design
• Robust Locally Weighted Regression and Smoothing Scatterplots
• Statistical Case Studies for Industrial Process Improvement
• A practical guide to splines.

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