Thermoelastic vibration analysis of MEMS/NEMS plate resonators with voids

DOI10.1007/S00707-011-0557-0zbMath1330.74076OpenAlexW2063238383MaRDI QIDQ2392192

Jagan Nath Sharma, Dhruv Grover

Publication date: 1 August 2013

Published in: Acta Mechanica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s00707-011-0557-0

zbMATH Keywords

exact solutions for the free vibrations of platesmicroelectronics mechanical systems (MEMS)nanoelectronics mechanical systems (NEMS)

Mathematics Subject Classification ID

Vibrations in dynamical problems in solid mechanics (74H45) Plates (74K20) Thermal effects in solid mechanics (74F05)

Related Items (6)

Generalized thermoelastic diffusion in a nanoscale beam using eigenvalue approach ⋮ Transverse vibrations in micro-scale viscothermoelastic beam resonators ⋮ A GN model for thermoelastic interaction in a microscale beam subjected to a moving heat source ⋮ Exact Solution of Thermoelastic Damping and Frequency Shifts in a Nano-Beam Resonator ⋮ Thermoelastic damping in micromechanical resonators operating as mass sensors ⋮ Size-dependent dynamic modeling and vibration analysis of MEMS/NEMS-based nanomechanical beam based on the nonlocal elasticity theory

Uses Software

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Cites Work

• Natural frequencies of heated annular and circular plates
• Three-dimensional vibration analysis of a thermoelastic cylindrical panel with voids
• Linear elastic materials with voids
• A theory of thermoelastic materials with voids
• A nonlinear theory of elastic materials with voids
• Thermoelastic damping in micro-beam resonators
• A generalized dynamical theory of thermoelasticity
• Analysis of the Air-damping Effect on a Micromachined Beam Resonator

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