Surface instability of thin polymer resist films with phase change effects on coating flow using numerical approximation techniques

DOI10.1016/j.camwa.2014.08.003zbMath1362.76005OpenAlexW2023040554MaRDI QIDQ2397223

Ming-Che Lin

Publication date: 30 May 2017

Published in: Computers \& Mathematics with Applications (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.camwa.2014.08.003

zbMATH Keywords

phase changecoating flowpolymer resists

Mathematics Subject Classification ID

Non-Newtonian fluids (76A05) Thin fluid films (76A20) Rotation in hydrodynamic stability (76E07) Ginzburg-Landau equations (35Q56)

Cites Work

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