Accurate simulations of 2-D phase shift masks with a generalized discontinuous Galerkin (GDG) method
DOI10.3934/dcdsb.2011.15.401zbMath1210.35034OpenAlexW2322575828MaRDI QIDQ2430094
Publication date: 5 April 2011
Published in: Discrete and Continuous Dynamical Systems. Series B (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.3934/dcdsb.2011.15.401
perfectly matched layer (PML)discontinuous Galerkin method (DG)generalized discontinuous Galerkin method (GDG)phase shift masks (PSM)
PDEs in connection with optics and electromagnetic theory (35Q60) Finite element, Rayleigh-Ritz and Galerkin methods for boundary value problems involving PDEs (65N30) Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory (78M10) Laplace operator, Helmholtz equation (reduced wave equation), Poisson equation (35J05)
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