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Simulation of multigrain thin film growth. - MaRDI portal

Simulation of multigrain thin film growth.

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Publication:2496509

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DOI10.4171/IFB/133zbMath1101.35075OpenAlexW2086547529MaRDI QIDQ2496509

Anthony Tongen, David L. Chopp

Publication date: 10 July 2006

Published in: Interfaces and Free Boundaries (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.4171/ifb/133

zbMATH Keywords

diffusion level set method deposition texture semiconductor manufacturing marker particle method

Mathematics Subject Classification ID

Granularity (74E20)

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