The role of the sample shape and size on the internal stress induced curvature of thin-film substrate systems
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Publication:2567373
DOI10.1016/J.IJSOLSTR.2004.03.015zbMATH Open1182.74147OpenAlexW2066806354MaRDI QIDQ2567373
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Publication date: 4 October 2005
Published in: (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1016/j.ijsolstr.2004.03.015
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