Analysis of plane cylindrical wafer defects by the spectral-domain integral equation method

DOI10.1007/S10598-015-9303-0zbMath1332.78015OpenAlexW2320383587MaRDI QIDQ259298

V. V. Lopushenko

Publication date: 11 March 2016

Published in: Computational Mathematics and Modeling (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s10598-015-9303-0

zbMATH Keywords

integral equationsdiffractionmathematical modelingnanostructureswave scattering

Mathematics Subject Classification ID

Diffraction, scattering (78A45) Finite volume methods, finite integration techniques applied to problems in optics and electromagnetic theory (78M12)

Related Items (1)

Investigation of plane defects in a dielectric wafer by spectral-domain integral equation method

Cites Work

• Method of integral equations in the spectral domain for the analysis of plane defects of a substrate
• Principles of Optics
• Slot Coupling of Rectangular and Spherical Wave Guides
• Analysis of inhomogeneities on wafers by the integral transform method

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