Modeling of electrothermal microactuator
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Publication:2662130
DOI10.1007/978-981-15-9708-4_9zbMATH Open1469.78038OpenAlexW3136669922MaRDI QIDQ2662130
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Publication date: 9 April 2021
Full work available at URL: https://doi.org/10.1007/978-981-15-9708-4_9
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