Adaptive iterative extended state observer-based data-driven iterative learning model predictive control for semiconductor silicon single crystal batch process

DOI10.1016/J.JFRANKLIN.2023.01.035OpenAlexW4318384285MaRDI QIDQ2687804

Junchao Ren, Yin Wan, Ding Liu

Publication date: 7 March 2023

Published in: Journal of the Franklin Institute (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.jfranklin.2023.01.035

zbMATH Keywords

model predictive controldynamic linearizationadaptive iterative extended state observer

Mathematics Subject Classification ID

Adaptive control/observation systems (93C40) Model predictive control (93B45) Iterative learning control (93B47) Observers (93B53)

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Cites Work

• Active Disturbance Rejection Control for Nonaffined Globally Lipschitz Nonlinear Discrete-Time Systems

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