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Methods and tools for evaluating the characteristics of MIS-capacitor gas sensors - MaRDI portal

Methods and tools for evaluating the characteristics of MIS-capacitor gas sensors

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Publication:2689586

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DOI10.1134/S00051179220100162OpenAlexW4313177539MaRDI QIDQ2689586

B. I. Podlepetsky, M. O. Etrekova, N. N. Samotaev, Alexey Litvinov

Publication date: 13 March 2023

Published in: Automation and Remote Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1134/s00051179220100162

zbMATH Keywords

capacitance-voltage characteristic gas-sensitive MIS capacitor MIS structure output signal

Mathematics Subject Classification ID

Chemistry (92E99) Technical applications of optics and electromagnetic theory (78A55) Electrochemistry (78A57)

Cites Work

Integrated hydrogen sensors based on MIS transistor sensitive elements: modeling of characteristics

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