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Mechanics of defects in dislocation-free silicon single crystals - MaRDI portal

Mechanics of defects in dislocation-free silicon single crystals

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Publication:2699183

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DOI10.3103/S0025654422601513OpenAlexW4366609479MaRDI QIDQ2699183

N. A. Verezub, A. I. Prostomolotov

Publication date: 26 April 2023

Published in: Mechanics of Solids (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.3103/s0025654422601513

zbMATH Keywords

diffusion simulation Czochralski method silicon recombination single crystal intrinsic point defect microdefect thermal annealing

Mathematics Subject Classification ID

Mechanics of deformable solids (74-XX)

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