Reduced Order Modeling and Control of Thin Film Growth in an HPCVD Reactor

DOI10.1137/S0036139901383280zbMath1005.93022MaRDI QIDQ2783754

Grace M. Kepler, Beeler, S. C., Hien T. Tran, Harvey Thomas Banks

Publication date: 17 April 2002

Published in: SIAM Journal on Applied Mathematics (Search for Journal in Brave)

zbMATH Keywords

state-dependent Riccati equationproper orthogonal decompositionchemical vapor depositionstate estimatorreduced order modelnonlinear compensatorfilm growthnonlinear feedback tracking control

Mathematics Subject Classification ID

Control/observation systems governed by partial differential equations (93C20) Nonlinear systems in control theory (93C10) Application models in control theory (93C95) System structure simplification (93B11) Chemically reacting flows (80A32)

Related Items (9)

An observer-based controller for nonlinear systems: a gain scheduling approach ⋮ Nonlinear feedback controllers and compensators: a state-dependent Riccati equation approach ⋮ Observer-based controller for discrete-time systems: a state dependent Riccati equation approach ⋮ Optimal Tracking for State-Dependent Coefficient Factorized Nonlinear Systems ⋮ A reduced-basis discretization method for chemical vapor deposition reactor simulation ⋮ Unnamed Item ⋮ Control for a Class of Second-Order Systems via a State-Dependent Riccati Equation Approach ⋮ A POD projection method for large-scale algebraic Riccati equations ⋮ Optimality of Balanced Proper Orthogonal Decomposition for Data Reconstruction

Uses Software

• MPSalsa

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