Effect of Improved Tracking for Atomic Force Microscope on Piezo Nonlinear Behavior

DOI10.1002/asjc.924zbMath1332.93131OpenAlexW1498716641MaRDI QIDQ2789980

Ian R. Petersen, Md. Sohel Rana, Hemanshu R. Pota, Habib Habibullah

Publication date: 2 March 2016

Published in: Asian Journal of Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/asjc.924

zbMATH Keywords

hysteresiscreepmodel predictive control (MPC)nanotechnologyatomic force microscopecross-couplingvibration compensator

Mathematics Subject Classification ID

Design techniques (robust design, computer-aided design, etc.) (93B51)

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