Overview and new results in disturbance observer based adaptive vibration rejection with application to advanced manufacturing

DOI10.1002/ACS.2546zbMath1333.93137OpenAlexW1942482870MaRDI QIDQ2793966

Xu Chen, Masayoshi Tomizuka

Publication date: 17 March 2016

Published in: International Journal of Adaptive Control and Signal Processing (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/acs.2546

zbMATH Keywords

semiconductor manufacturingdisturbance observerinverse-based controladaptive vibration rejectionadvanced manufacturingnarrow-band disturbances

Mathematics Subject Classification ID

Production models (90B30) Adaptive control/observation systems (93C40) Vibrations in dynamical problems in solid mechanics (74H45) Observability (93B07)

Related Items (3)

Editorial for the special issue on recent advances in adaptive methods for frequency estimation with applications ⋮ A frequency-shaping methodology for discrete-time sliding mode control ⋮ Event-based disturbance compensation control for discrete-time SPMSM with mismatched disturbances

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