Sensitivity analysis for indirect measurement in scatterometry and the reconstruction of periodic grating structures

DOI10.1080/17455030701481823zbMath1271.78036OpenAlexW2080497221MaRDI QIDQ2846090

Hermann Gross, Andreas Rathsfeld

Publication date: 5 September 2013

Published in: Waves in Random and Complex Media (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/17455030701481823

Mathematics Subject Classification ID

Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory (78M10) Composite media; random media in optics and electromagnetic theory (78A48) Inverse problems (including inverse scattering) in optics and electromagnetic theory (78A46)

Uses Software

• DIPOG

Cites Work

• Unnamed Item
• Finite element analysis of acoustic scattering
• Numerical solution of optimal design problems for binary gratings
• The partition of unity finite element method: basic theory and applications
• Maxwell's Equations in a Periodic Structure
• Convergence of the Galerkin Method for Two-Dimensional Electromagnetic Problems
• A frequency-domain formulation of the Fréchet derivative to exploit the inherent parallelism of the distorted Born iterative method
• Application of an Ultra Weak Variational Formulation of Elliptic PDEs to the Two-Dimensional Helmholtz Problem
• Conical diffraction by periodic structures: Variation of interfaces and gradient formulas
• Finite Element Approximation of Time Harmonic Waves in Periodic Structures
• Optimization
• Finite element solution of conical diffraction problems

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