Dynamics of electrostatic microelectromechanical systems actuators

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Publication:2861712

DOI10.1063/1.3684748zbMath1274.74050arXiv1201.5439OpenAlexW1977847933MaRDI QIDQ2861712

Yisong Yang, Le Zhao, Rui-feng Zhang

Publication date: 11 November 2013

Published in: Journal of Mathematical Physics (Search for Journal in Brave)

Full work available at URL: https://arxiv.org/abs/1201.5439



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