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Self-oscillation loop design and measurement for an MEMS resonant accelerometer - MaRDI portal

Self-oscillation loop design and measurement for an MEMS resonant accelerometer

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Publication:2868147

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DOI10.1002/ACS.2361zbMath1278.93137OpenAlexW1542496202MaRDI QIDQ2868147

Liu Heng, Meng Rui Li

Publication date: 23 December 2013

Published in: International Journal of Adaptive Control and Signal Processing (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/acs.2361

zbMATH Keywords

averaging method electrostatic stiffness resonant accelerometer self-sustained oscillation

Mathematics Subject Classification ID

Feedback control (93B52) Control of mechanical systems (70Q05) Control/observation systems governed by ordinary differential equations (93C15)

Cites Work

Mode localization induced by a nonlinear control loop

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