Inverse-feedforward and robust-feedback control for high-speed operation on piezo-stages

DOI10.1080/00207179.2012.721568zbMath1278.74051OpenAlexW1999135639MaRDI QIDQ2871701

Po-Jen Ko, Szu-Chi Tien, Yen-Po Wang

Publication date: 9 January 2014

Published in: International Journal of Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/00207179.2012.721568

zbMATH Keywords

robust controlfeedforward controlhysteresis compensationpiezo-stage

Mathematics Subject Classification ID

Sensitivity (robustness) (93B35) Feedback control (93B52) Lyapunov and other classical stabilities (Lagrange, Poisson, (L^p, l^p), etc.) in control theory (93D05) Vibrations in dynamical problems in solid mechanics (74H45) Electromagnetic effects in solid mechanics (74F15) Optimization problems in solid mechanics (74P99)

Cites Work

• One dimensional dynamic electromechanical constitutive relations of ferroelectric materials
• State-space solutions to standard H/sub 2/ and H/sub infinity / control problems
• Controller reduction: concepts and approaches
• Should model-based inverse inputs be used as feedforward under plant uncertainty?

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