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zbMath1254.78024MaRDI QIDQ2895237

Liang Shi, Jin-Liang Yan, Aili Li, Jian-Jun Liu

Publication date: 2 July 2012

Title: zbMATH Open Web Interface contents unavailable due to conflicting licenses.

zbMATH Keywords

Ca\(_2\)O\(_3\) ceramic target deep ultraviolet transparent conductive film electrical and optical property Ga\(_2\)O\(_3\)/ITO/Ga\(_2\)O\(_3\) films

Mathematics Subject Classification ID

Diffraction, scattering (78A45) Technical applications of optics and electromagnetic theory (78A55)

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