Control Charts for Particles in the Semiconductor Manufacturing Process

DOI10.1515/EQC.2008.95zbMath1247.90182OpenAlexW2029607338MaRDI QIDQ2915298

Masanobu Higashide, Hironobu Kawamura, Ken Nishina

Publication date: 16 September 2012

Published in: Economic Quality Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1515/eqc.2008.95

Mathematics Subject Classification ID

Applications of statistics in engineering and industry; control charts (62P30) Reliability, availability, maintenance, inspection in operations research (90B25) Case-oriented studies in operations research (90B90)

Cites Work

• Performance of Some Resistant Rules for Outlier Labeling

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