Thermal budget control for processes with spike-shaped temperature profiles: Application to rapid thermal annealing

DOI10.1002/ASJC.435zbMath1303.93083OpenAlexW2015167403MaRDI QIDQ2937836

Jyh-Cheng Jeng, Bo-Chi Li

Publication date: 13 January 2015

Published in: Asian Journal of Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/asjc.435

zbMATH Keywords

rapid thermal processingspike annealingthermal budget control

Mathematics Subject Classification ID

Production models (90B30) Application models in control theory (93C95) Design techniques (robust design, computer-aided design, etc.) (93B51) Control/observation systems governed by ordinary differential equations (93C15)

Cites Work

• On the Lambert \(w\) function
• Selection of measurement locations for the control of rapid thermal processor
• Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities.

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