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Numerical modeling of a MEMS actuator considering several magnetic force calculation methods

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Publication:2970481
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DOI10.1108/03321641111133118zbMath1358.78038OpenAlexW1991934534MaRDI QIDQ2970481

Wolfgang Mathis, Thomas Preisner, Andreas Gerber, Karin Bauer, Christian Bolzmacher, Eckhard Quandt

Publication date: 30 March 2017

Published in: COMPEL - The international journal for computation and mathematics in electrical and electronic engineering (Search for Journal in Brave)

Full work available at URL: http://www.repo.uni-hannover.de/handle/123456789/2768


zbMATH Keywords

MEMSactuatorsforce measurement


Mathematics Subject Classification ID

Finite element, Rayleigh-Ritz and Galerkin methods for boundary value problems involving PDEs (65N30) Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory (78M10) Technical applications of optics and electromagnetic theory (78A55)


Related Items (1)

Numerical modeling of a MEMS actuator considering several magnetic force calculation methods




Cites Work

  • Numerical modeling of a MEMS actuator considering several magnetic force calculation methods




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