Discrete Relaxation Method for Triple Patterning Lithography Layout Decomposition
From MaRDI portal
Publication:2989515
DOI10.1109/TC.2016.2582154zbMath1364.90294MaRDI QIDQ2989515
Ziran Zhu, Xing-Quan Li, Wen-Xing Zhu
Publication date: 8 June 2017
Published in: IEEE Transactions on Computers (Search for Journal in Brave)
Related Items (1)
This page was built for publication: Discrete Relaxation Method for Triple Patterning Lithography Layout Decomposition