Measurement and tracking control of the Z‐tilts error compensating stage of the nano‐measuring machine

DOI10.1108/03684921011046807zbMath1221.93200OpenAlexW2009890240MaRDI QIDQ3018726

Yu-Chen Lin, Van-Tsai Liu, Chieh-Li Chen, Hau-Wei Li, Chien-Hung Liu, Chun-Liang Lin

Publication date: 27 July 2011

Published in: Kybernetes (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1108/03684921011046807

zbMATH Keywords

trackingcontrol systemspiezoelectricityactuatorscybernetics

Mathematics Subject Classification ID

Application models in control theory (93C95)

Cites Work

• Preisach modeling of hysteresis for piezoceramic actuator system
• The second stir and incompleteness of quantitative analysis
• Adaptive variable structure control of a class of nonlinear systems with unknown Prandtl-Ishlinskii hysteresis
• State-space analysis and identification for a class of hysteretic systems