Electrostatic BEM for MEMS with thin beams

DOI10.1002/cnm.748zbMath1064.78014OpenAlexW2041320088MaRDI QIDQ3022745

Zhongping Bao, Subrata Mukherjee

Publication date: 30 June 2005

Published in: Communications in Numerical Methods in Engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1002/cnm.748

zbMATH Keywords

boundary element methodsingular integralsboundary integral equationsmicro-electro-mechanical systemsnearly singular integralsthin beamsthin curved beams

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Boundary element methods applied to problems in optics and electromagnetic theory (78M15)

Related Items (6)

Charge distribution on narrow MEMS beams of nearly square cross‐section ⋮ Application of singular elements for fully Lagrangian modeling of dynamics of MEMS with thin beams ⋮ Modeling of the ground plane in electrostatic BEM analysis of MEMS and NEMS ⋮ Dual BIE approaches for modeling electrostatic MEMS problems with thin beams and accelerated by the fast multipole method ⋮ An explicit drive algorithm for aiding the design of firing sequence in side‐drive micromotor ⋮ Charge distribution on thin semiconducting silicon nanowires

Uses Software

• Fastcap

Cites Work

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• On Boundary Integral Equations for Cracked and for thin Bodies
• On the application of 2D potential theory to electrostatic simulation

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