Performance assessment of run-to-run control in semiconductor manufacturing based on IMC framework

DOI10.1080/00207540802029633zbMath1198.90113OpenAlexW2144614424MaRDI QIDQ3055360

David Shan-Hill Wang, Shi-Shang Jang, Liang Chen, Ming-Da Ma, Shuqing Wang

Publication date: 7 November 2010

Published in: International Journal of Production Research (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/00207540802029633

zbMATH Keywords

performance assessmentIMCbest achievable performancerun-to-run controlminimum variance performance

Mathematics Subject Classification ID

Production models (90B30)

Cites Work

• Good, bar or optimal? Performance assessment of multivariable processes
• Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities.
• Performance assessment of multivariable feedback control systems
• Performance assessment of multivariable feedback controllers

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