A self-growing hidden Markov tree for wafer map inspection

DOI10.1016/J.JPROCONT.2008.04.008zbMath1198.93135OpenAlexW2018484380MaRDI QIDQ3055628

Junghui Chen, Chung-Chih Chen, Chia-Jung Hsu

Publication date: 8 November 2010

Published in: Journal of Process Control (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1016/j.jprocont.2008.04.008

zbMATH Keywords

hidden Markov modelwavelet transformprocess monitoringwafer map

Mathematics Subject Classification ID

Nontrigonometric harmonic analysis involving wavelets and other special systems (42C40) Application models in control theory (93C95) Estimation and detection in stochastic control theory (93E10)

This page was built for publication: A self-growing hidden Markov tree for wafer map inspection