A general procedure for thermomechanical calibration of nano/micro-mechanical resonators

DOI10.1016/J.AOP.2013.08.003zbMath1343.74038arXiv1305.0557OpenAlexW3100473366MaRDI QIDQ306895

F. Blanchet-Sadri, M. Dambrine

Publication date: 1 September 2016

Published in: Annals of Physics (Search for Journal in Brave)

Full work available at URL: https://arxiv.org/abs/1305.0557

zbMATH Keywords

MEMSclassical resonatordamped Brownian motionNEMSthermomechanical calibration

Mathematics Subject Classification ID

Micromechanics of solids (74M25) Thermal effects in solid mechanics (74F05) Micromechanical theories (74A60)

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Cites Work

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