Study the Effect of CO2 Laser Annealing on Silicon Nanostructures

DOI10.5539/MAS.V4N12P56zbMATH Open1210.78024OpenAlexW2083135384MaRDI QIDQ3070516

Bassam G. Rasheed, Ali L. Abed

Publication date: 3 February 2011

Published in: Modern Applied Science (Search for Journal in Brave)

Full work available at URL: http://www.ccsenet.org/journal/index.php/mas/article/view/8434

zbMATH Keywords

laser ablationsilicon nanostructureslaser annealing

Mathematics Subject Classification ID

Lasers, masers, optical bistability, nonlinear optics (78A60) Statistical mechanics of nanostructures and nanoparticles (82D80)

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