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Publication:3086740
zbMath1219.93087MaRDI QIDQ3086740
Publication date: 30 March 2011
Title: zbMATH Open Web Interface contents unavailable due to conflicting licenses.
control system architectureelectrostatic microelectromechanical systems (MEMS)high control bandwidth
Application models in control theory (93C95) Design techniques (robust design, computer-aided design, etc.) (93B51)
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