Minimising idle times in cluster tools in the semiconductor industry

DOI10.1080/00207540903280556zbMath1197.90291OpenAlexW2095744250MaRDI QIDQ3163143

Ilan Gilad, N. Lati

Publication date: 25 October 2010

Published in: International Journal of Production Research (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/00207540903280556

zbMATH Keywords

waiting timesequencingbottleneckrobotic cellidle timecluster tool

Mathematics Subject Classification ID

Queues and service in operations research (90B22) Case-oriented studies in operations research (90B90)

Cites Work

• Approximation algorithms for \(k\)-unit cyclic solutions in robotic cells
• Cyclic Scheduling of Identical Parts in a Robotic Cell

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