Scheduling semiconductor in-line steppers in new product/process introduction scenarios
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Publication:3163705
DOI10.1080/00207540802577920zbMath1197.90237OpenAlexW2025087495MaRDI QIDQ3163705
Publication date: 26 October 2010
Published in: International Journal of Production Research (Search for Journal in Brave)
Full work available at URL: https://doi.org/10.1080/00207540802577920
design of experimentscomputer visionroboticsavailabilitycontrol chartsdesign for manufacturecapability indicesactivity based costing
Related Items (2)
The throughput rate of serial production lines with deterministic process times and random setups: Markovian models and applications to semiconductor manufacturing ⋮ Scheduling of multiple in-line steppers for semiconductor wafer fabs
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Cites Work
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- Make-to-order scheduling in foundry semiconductor fabrication
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