scientific article

zbMATH Open0558.65088MaRDI QIDQ3347237

Horst Elschner, Wilfried Klix, Rainer G. Spallek

Publication date: 1984

Title of this publication is not available (Why is that?)

zbMATH Keywords

simulationdiffusion equationcomputer aided designsemiconductorselectromagnetic equationsdopingthermal problems in microelectronics

Mathematics Subject Classification ID

Probabilistic models, generic numerical methods in probability and statistics (65C20) Technical applications of optics and electromagnetic theory (78A55) Partial differential equations of mathematical physics and other areas of application (35Q99) Applications to the sciences (65Z05)

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