Data transformation in SPC for semiconductor machinery control: A case of monitoring particles

DOI10.1080/00207540500070475zbMath1082.90516OpenAlexW2079030878MaRDI QIDQ3369499

No author found.

Publication date: 2 February 2006

Published in: International Journal of Production Research (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/00207540500070475

zbMATH Keywords

semiconductor manufacturingcontrol chartparticle countsmachinery control

Mathematics Subject Classification ID

Production models (90B30)

Cites Work

• Unnamed Item
• Performance of Some Resistant Rules for Outlier Labeling
• Control chart for multivariate attribute processes
• Zero-inflated Poisson model in statistical process control.

This page was built for publication: Data transformation in SPC for semiconductor machinery control: A case of monitoring particles