Micro-three dimensional shape measurement method based on shadow Moiré using scanning electron microscopy

DOI10.1080/09500340600809285zbMath1121.78335OpenAlexW2046244357MaRDI QIDQ3430762

Shunsuke Yokozeki, Yasuhiko Arai

Publication date: 23 March 2007

Published in: Journal of Modern Optics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1080/09500340600809285

zbMATH Keywords

electron microscopybackscattered electronsmeasurement methoddiffraction limitMoirè topography

Mathematics Subject Classification ID

Technical applications of optics and electromagnetic theory (78A55) Lasers, masers, optical bistability, nonlinear optics (78A60)

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