Phosphorus diffusion in silicon

DOI10.1017/S0956792500000139zbMath0709.35516OpenAlexW2169738485MaRDI QIDQ3492094

John R. King

Publication date: 1990

Published in: European Journal of Applied Mathematics (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1017/s0956792500000139

Mathematics Subject Classification ID

Partial differential equations (35-XX)

Cites Work

• Approximate solutions to a nonlinear diffusion equation
• Diffusion of Dopant in Crystalline Silicon: An Asymptotic Analysis

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