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Design and synthesis of wide tuning range variable comb drive MEMS capacitors - MaRDI portal

Design and synthesis of wide tuning range variable comb drive MEMS capacitors

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Publication:3508813

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DOI10.1108/03321640710751154zbMath1153.78341OpenAlexW1982075973MaRDI QIDQ3508813

Weijie Wan, David A. Lowther

Publication date: 1 July 2008

Published in: COMPEL - The international journal for computation and mathematics in electrical and electronic engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1108/03321640710751154

Mathematics Subject Classification ID

Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory (78M10) Technical applications of optics and electromagnetic theory (78A55) Optimization problems in optics and electromagnetic theory (78M50)

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