Multiscale analysis of nonequilibrium rarefied gas flows with the application to silicon thin film process employing supersonic jet

DOI10.1063/1.1659745zbMath1186.76457OpenAlexW1973167340MaRDI QIDQ3554397

Yoichiro Matsumoto, Shu Takagi, Y. Sakiyama

Publication date: 22 April 2010

Published in: Physics of Fluids (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1063/1.1659745

zbMATH Keywords

Monte Carlo methodshydrogensupersonic flowjetsab initio calculationsflow simulationnonequilibrium flowrarefied fluid dynamicssilicon compounds

Mathematics Subject Classification ID

Monte Carlo methods (65C05) Compressible fluids and gas dynamics (76N99) Supersonic flows (76J20)

Related Items (1)

Shock structure in low density gas mixture flows over cylinders and plates

Cites Work

• Strategies for efficient particle resolution in the direct simulation Monte Carlo method.
• Dynamic molecular collision (DMC) model for rarefied gas flow simulations by the DSMC method
• Multistage gas–surface interaction model for the direct simulation Monte Carlo method
• Variable soft sphere molecular model for inverse-power-law or Lennard-Jones potential
• Rates of thermal relaxation in direct simulation Monte Carlo methods

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