Unified nonlinear quasistatic and dynamic analysis of RF-MEMS switches

DOI10.1007/s00707-013-0831-4zbMath1321.74052OpenAlexW2016582734MaRDI QIDQ359442

Yingli Li, Daolin Xu, Shaker A. Meguid, Yi-Ming Fu

Publication date: 12 August 2013

Published in: Acta Mechanica (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1007/s00707-013-0831-4

Mathematics Subject Classification ID

Rods (beams, columns, shafts, arches, rings, etc.) (74K10) Control, switches and devices (``smart materials) in solid mechanics (74M05) Micromechanics of solids (74M25)

Related Items (6)

Nonlocal thermoelastic analysis of a functionally graded material microbeam ⋮ Analysis of micro-rotating disks based on the strain gradient elasticity ⋮ Transient thermoelastic response of a size‐dependent nanobeam under the fractional order thermoelasticity ⋮ Size-dependent dynamic modeling and vibration analysis of MEMS/NEMS-based nanomechanical beam based on the nonlocal elasticity theory ⋮ An analytical solution for thermoelastic damping in a micro-beam based on generalized theory of thermoelasticity and modified couple stress theory ⋮ Analytical solution for nonlocal coupled thermoelasticity analysis in a heat-affected MEMS/NEMS beam resonator based on Green-Naghdi theory

Cites Work

• Electromechanical dynamic buckling phenomenon in symmetric electric fields actuated microbeams considering material damping
• A microstructure-dependent Timoshenko beam model based on a modified couple stress theory
• Dynamic pull-in phenomenon in MEMS resonators
• A novel atomistic approach to determine strain-gradient elasticity constants: tabulation and comparison for various metals, semiconductors, silica, polymers and the (ir)relevance for nanotechnologies
• Couple stress based strain gradient theory for elasticity
• Non-local elastic plate theories

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