Parametric Modelling of Microresonators Dynamics with Considering Thermal Effects

DOI10.1142/9789812772428_0038zbMath1350.74019OpenAlexW2329675589MaRDI QIDQ3595790

M. A. Tadayon, Hassan Sayyadi, G. Nakhaie Jazar

Publication date: 28 August 2007

Published in: Nonlinear Science and Complexity (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1142/9789812772428_0038

zbMATH Keywords

thermoelasticnonlinear modelingmicrocantileverthermal dampingthermal relaxationmicroresonatorscapacitive sensorsMEMS dynamics

Mathematics Subject Classification ID

Micromechanics of solids (74M25) Thermal effects in solid mechanics (74F05) Electromagnetic effects in solid mechanics (74F15)

This page was built for publication: Parametric Modelling of Microresonators Dynamics with Considering Thermal Effects