Finite element modelling of a thin‐film bulk acoustic resonator (FBAR)

DOI10.1108/03321640810905774zbMath1158.78326OpenAlexW2024678871MaRDI QIDQ3613707

Mauro Feliziani, Piero Tognolatti, Concettina Buccella, Valerio de Santis

Publication date: 12 March 2009

Published in: COMPEL - The international journal for computation and mathematics in electrical and electronic engineering (Search for Journal in Brave)

Full work available at URL: https://doi.org/10.1108/03321640810905774

zbMATH Keywords

wavesfinite element analysisnumerical analysispiezoelectricity

Mathematics Subject Classification ID

Electromagnetic effects in solid mechanics (74F15) Finite element, Galerkin and related methods applied to problems in optics and electromagnetic theory (78M10)

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